Ti-doped WO3 film can be prepared by magnetron sputtering method. Experts used metal tungsten and tungsten-titanium alloy as targets, and undoped WO3 film and Ti-doped tungsten trioxide electrochromic film were prepared by pulsed DC reactive magnetron sputtering method. And the effects of film thickness on the crystal structure, surface morphology and electrochromic properties of the film during the preparation process were investigated.
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Experts found that the change of lattice strain and surface roughness after WO3 film coloration decreases first and then increases with the increase of film thickness. Under the same driving voltage, when the film with a thickness of 300nm is discolored, the lithium ion migration is hindered due to excessive lattice strain, and some of the W5+ cannot be converted into W6+, so that the film cannot be completely faded. And the discoloration amplitude becomes small while the coloring efficiency decreases. When the film thickness is 250nm, the electrochromic performance is the best. And the optical modulation amplitude and color change efficiency are high.
