Compared with undoped tungsten oxide, noble metal doped tungsten oxide, such as Pt-doped tungsten oxide, Pd-doped tungsten oxide, and Au-doped tungsten oxide, has better sensitivity to the main source of pollution in chemical sites such as NO2, CO, H2S, and acetone gas.
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Some experts used DC sputtering method to prepare gas sensors by doping Pt, Pd and Au in tungsten trioxide. After comparison tests, the results show that the sensitivity of the Au-doped tungsten trioxide film to NO2 is increased from 17x10-6 (undoped one) to 69x10-6, while the sensitivity of Pd-doped WO3 film to NO2 is 17x10-6 (undoped one) increased to 24x10-6. The maximum detection sensitivity of NO2 is 200x10-6. That is to say, noble metal doped WO3 is a highly efficient NO2 gas sensing material, which shows great potential and good prospects in the application of high performance and low power NO2 gas sensor. And it can mitigate the serious threat to human health and the environment caused by atmospheric pollutants such as nitrogen oxides to some extent.