What' Tungsten hexafluoride
Tungsten hexafluoride
Tungsten(VI) fluoride, also known as tungsten hexafluoride, is the inorganic compound of tungsten and fluorine with the formula WF6. This corrosive, colourless compound is the densest known gas at a pressure of 1 atm and room temperature (25 °C). The molecule is octahedral with the symmetry point group of Oh. The gas is most commonly used in the production of semiconductor circuits and circuit boards through the process of chemical vapor deposition
Synthesis
Tungsten hexafluoride is produced by the exothermic reaction of fluorine gas with tungsten powder: W + 3 F2 → WF6
The gaseous product is condensed and separated by distillation from WOF4, a common impurity. In a variation on the direct fluorination, the metal is placed in a heated reactor, slightly pressurized to 1.2 to 2.0 psi, with a constant flow of WF6 infused with a small amount of fluorine gas.
Reactions
On contact with water tungsten(VI) fluoride gives hydrogen fluoride (HF) and tungsten oxyfluorides, eventually forming tungsten trioxide:
WF6 + 3 H2O → WO3 + 6 HF
Unlike other well-known metal fluorides, WF6 is not a useful fluorinating agent nor is it a powerful oxidant. It can be reduced to the tungsten(V) derivative NaWF6. Regarding its applications in microelectronics, WF6 is used to deposit tungsten films. Two routes are employed, thermal decomposition and hydrogen reduction. Both processes rely on CVD technology
Safety
WF6 is extremely corrosive compound that attacks any tissue. The release of hydrogen fluoride is also dangerous.
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Disclaimer: The article is only reflecting the opinions of the author. We have no responsibility to prove the originality and authenticity of the content, words and/or pictures. You readers should just take it as reference and check the details by yourselves. And the content is not a suggestion for investment decision. The investor takes his or her own risks if he or she operates accordingly. If you have any dissent about the contents above, please contact the relevant author, or the webmaster. We will try our best to assist the dealing of the related issues. Thanks for your visit and cooperation.
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